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Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

來源:  91在线观看（huì）儀器   作（zuò）者（zhě）:  管理員   時（shí）間:  2021-09-08  點擊:   1397 次（cì）


Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering.pdf


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